Study on Zinc-Modified Adsorbent for Adsorption of Trace CO2 in Electronic Special Gas BF3

Usually, the ion implantation gases used in semiconductor production are required to be extremely high purity. Due presence of trace CO2 electronic special gas BF3, quality material is significantly affected, which makes it crucial impose control on content. Unlike a series blank adsorbents reported other studies, zinc-loaded prepared this study intended for adsorption from CO2/BF3. Firstly, materials were characterized by XRD, BET, SEM-EDS and TG-DSC analysis, etc., breakthrough curves as obtained under different preparation conditions investigated at 20 °C 200 kPa. The results show that performance reached optimal level when activation temperature was 450 13X molecular sieve impregnated 0.15 mol/L Zn(NO3)2. Moreover, compared with Zn-13X, time reduced 69% 44% two cycles, respectively. Finally, FTIR reveal mechanism carbonates produced adsorption. It found affected irreversible reduction number active sites due continuous formation polydentate carbonate during regeneration.